Optical device package and method for manufacturing the same

ABSTRACT

An optical device package includes a semiconductor substrate, and an optical device. The semiconductor substrate has a first surface, a second surface different in elevation from the first surface, and a profile connecting the first surface to the second surface. A surface roughness of the profile is greater than a surface roughness of the second surface. The optical device is disposed on the second surface and surrounded by the profile.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.15/998,408 filed Aug. 15, 2018, the contents of which is incorporatedherein by reference in its entirety.

BACKGROUND 1. Technical Field

The present disclosure relates to an optical device package andmanufacturing method thereof, and more particularly, to an opticaldevice package including a groove with a vertical sidewall profile fordisposing an optical device and manufacturing method thereof.

2. Description of the Related Art

An optical communication device uses a substrate with V-shaped groove todispose optical fiber. The V-shaped groove, however, has a largeraperture dimension in the surface of the substrate and larger depth inthe substrate. The V-shaped groove occupies a large amount of thesubstrate, which impedes the trend toward miniaturization of opticalcommunication devices.

SUMMARY

In some embodiments, an optical device package includes a semiconductorsubstrate and an optical device. The semiconductor substrate has a firstsurface, a second surface different in elevation from the first surface,and a profile connecting the first surface to the second surface. Asurface roughness of the profile is greater than a surface roughness ofthe second surface. The optical device is disposed on the second surfaceand surrounded by the profile.

In some embodiments, an optical device package includes a semiconductorsubstrate, a spacer and an optical device. The semiconductor substratehas a first surface, and a second surface connected to the firstsurface. The second surface is inclined with respect to the firstsurface. The spacer is disposed adjacent to the second surface. Thespacer has a first edge substantially perpendicular to the first surfaceof the semiconductor substrate. The optical device is surrounded by thefirst edge of the spacer.

In some embodiments, a method for manufacturing an optical devicepackage is provided. A semiconductor substrate is received. Thesemiconductor substrate is patterned to form a trench in thesemiconductor substrate. A patterned sacrificial layer is formed overthe semiconductor substrate, wherein the patterned sacrificial layercovers a portion of the semiconductor substrate, fills in the trench,and exposes another portion of the semiconductor substrate. Thesemiconductor substrate exposed from the patterned sacrificial layer ispartially removed to form a groove in the semiconductor substrate. Thepatterned sacrificial layer is removed from the semiconductor substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of some embodiments of the present disclosure are bestunderstood from the following detailed description when read with theaccompanying figures. Various structures may not be drawn to scale, andthe dimensions of the various structures may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 is a cross-sectional view of an optical device package inaccordance with some embodiments of the present disclosure.

FIG. 1A is a top view of an optical device package in accordance withsome embodiments of the present disclosure.

FIG. 1B, FIG. 1C, FIG. 1D, FIG. 1E, FIG. 1F and FIG. 1G are schematicdiagrams illustrating optical device packages in accordance with someother embodiments of the present disclosure.

FIG. 2A, FIG. 2B, FIG. 2C, FIG. 2D and FIG. 2E are schematic diagramsillustrating a method of fabricating an optical device package inaccordance with some embodiments of the present disclosure.

FIG. 3 is a cross-sectional view of an optical device package inaccordance with some embodiments of the present disclosure.

FIG. 4A, FIG. 4B, FIG. 4C and FIG. 4D are schematic diagramsillustrating a method of fabricating an optical device package inaccordance with some embodiments of the present disclosure.

FIG. 5 is a schematic diagram illustrating an optical device package inaccordance with some other embodiments of the present disclosure.

FIG. 6 is a cross-sectional view of an optical device package 100 inaccordance with some embodiments of the present disclosure.

FIG. 7A, FIG. 7B and FIG. 7C are schematic diagrams illustrating amethod of fabricating an optical device package in accordance with someembodiments of the present disclosure.

FIG. 8 is a cross-sectional view of an optical device package inaccordance with some embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to explain certain aspects of the present disclosure. These are,of course, merely examples and are not intended to be limiting. Forexample, the formation of a first feature over or on a second feature inthe description that follows may include embodiments in which the firstand second features are formed or disposed in direct contact, and mayalso include embodiments in which additional features are formed ordisposed between the first and second features, such that the first andsecond features are not in direct contact. In addition, the presentdisclosure may repeat reference numerals and/or letters in the variousexamples. This repetition is for the purpose of simplicity and clarityand does not in itself dictate a relationship between the variousembodiments and/or configurations discussed.

Spatial descriptions, such as “above,” “below,” “up,” “left,” “right,”“down,” “top,” “bottom,” “vertical,” “horizontal,” “side,” “higher,”“lower,” “upper,” “over,” “under,” and so forth, are indicated withrespect to the orientation shown in the figures unless otherwisespecified. It should be understood that the spatial descriptions usedherein are for purposes of illustration only, and that practicalimplementations of the structures described herein can be spatiallyarranged in any orientation or manner, provided that such arrangementdoes not deviate from the merits of the embodiments of this disclosure.

FIG. 1 is a cross-sectional view of an optical device package 1 inaccordance with some embodiments of the present disclosure, and FIG. 1Ais a top view of an optical device package 1 in accordance with someembodiments of the present disclosure. As shown in FIG. 1 and FIG. 1A,the optical device package 1 includes a semiconductor substrate 10, andan optical device 20. The semiconductor substrate 10 may include asilicon substrate, or a substrate made from another semiconductivematerial. The semiconductor substrate 10 has a first surface 101, asecond surface 102 different in elevation from the first surface 101,and a profile 103 connecting the first surface 101 to the second surface102. In some embodiments, the second surface 102 is lower than the firstsurface 101, and the first surface 101, the second surface 102 and theprofile 103 collectively form a groove 10V for disposing the opticaldevice 20. In some embodiments, the first surface 101 and the secondsurface 102 may be substantially parallel to each other. In someembodiments, a protection layer 12 can be disposed on the first surface101. The protection layer 12 may be configured as a mask layer such as ahard mask layer to protect the semiconductor substrate 10. The materialof the protection layer 12 may include silicon oxide, silicon nitride,or other suitable inorganic and/or organic materials.

As shown in FIG. 1, the profile 103 of the semiconductor substrate 10may include a first side surface 1031, a second side surface 1032 and athird surface 1033. The first side surface 1031 is connected to thefirst surface 101. The second side surface 1032 is connected to thesecond surface 102. The third surface 1033 is disposed between andconnected to the first side surface 1031 and the second side surface1032. In some embodiments, the second surface 102 is higher than thethird surface 1033. The third surface 1033 may be substantially parallelto the second surface 102. The first side surface 1031 and the secondside surface 1032 may be substantially perpendicular to the thirdsurface 1033.

The optical device 20 is disposed on the second surface 102 andsurrounded by the profile 103. In some embodiments, the optical device20 may include a tubular optical device having a curved outer surface,and extending along a direction D as shown in FIG. 1A. For example, theoptical device 20 may include an optical fiber or the like. In someembodiments, the optical device 20 is in contact with the second surface102 of the semiconductor substrate 10. In some embodiments, the opticaldevice 20 may be partially or entirely surrounded by the profile 103,depending on the height of the optical device 20. In some embodiments,the optical device 20 is in contact with the profile 103 of thesemiconductor substrate 10. For example, the optical device 20 may be incontact with the first side surface 1031 of the profile 103. In someembodiments, the first side surface 1031 may be substantially verticalwith respect to the first surface 101 of the semiconductor substrate 10.In some embodiments, the included angle between the first side surface1031 and the first surface 101 of the semiconductor substrate 10substantially ranges from about 88° to about 92°, for example, about90°. With the vertical first side surface 1031, the dimension of thegroove 10V proximal to the first surface 101 and the dimension of thegroove 10V proximal to the second surface 102 are substantially thesame. Accordingly, the overall space of the groove 10V can be reduced,which facilitates miniaturization of the optical device package 1. Inaddition, the optical device 20 can be securely fastened in the groove10V.

FIG. 2A, FIG. 2B, FIG. 2C, FIG. 2D and FIG. 2E are schematic diagramsillustrating a method of fabricating an optical device package inaccordance with some embodiments of the present disclosure. As shown inFIG. 2A, a semiconductor substrate 10 is received. In some embodiments,a protection layer 12 is formed on a first surface 101 of thesemiconductor substrate 10. The protection layer 12 may be configured asa hard mask layer, partially covering the first surface 101. As shown inFIG. 2B, a patterned sacrificial layer 14 such as a photoresist layer isformed over the semiconductor substrate 10. The patterned sacrificiallayer 14 includes openings 14H exposing a portion of the first surface101.

As shown in FIG. 2C, the semiconductor substrate 10 is patterned to formtrenches 10T in the semiconductor substrate 10. In some embodiments, thesemiconductor substrate 10 is patterned through the openings 14H of thepatterned sacrificial layer 14 by an anisotropic etching such as dryetching. For example, the dry etching may include plasma etching or thelike. The anisotropic etching is selected to form the trenches 10T suchthat the verticality of the sidewall of trench 10T can be maintained,particularly when the depth of the trench 10T is larger. In someembodiments, the depth of the trench 10T is greater than 200 micrometers(um) such as 250 um. In some embodiments, the included angle between thesidewall of the trench 10T and the first surface 101 of thesemiconductor substrate 10 substantially ranges from about 88° to about92°, for example, about 90°. In some embodiments, the bottom and thesidewalls of the trench 10T have rough surfaces when the trench 10T isformed by anisotropic etching. In some embodiments, the patternedsacrificial layer 14 is removed from the semiconductor substrate 10after the trench 10T is formed.

As shown in FIG. 2D, another patterned sacrificial layer 16 such as aphotoresist layer is formed over the semiconductor substrate 10. Thepatterned sacrificial layer 16 may cover a portion of the semiconductorsubstrate 10 and fill in the trench 10T. The patterned sacrificial layer16 includes openings 16H exposing another portion of the semiconductorsubstrate 10, for example the portion of the semiconductor substrate 10between the trenches 10T.

As shown in FIG. 2E, the semiconductor substrate 10 exposed from thepatterned sacrificial layer 16 is partially removed to form a groove 10Vin the semiconductor substrate 10. In some embodiments, thesemiconductor substrate 10 is partially removed through the openings 16Hof the patterned sacrificial layer 16 by an isotropic etching such aswet etching. The isotropic etching is selected to form the groove 10V,so as to remove defects and residues at the bottom of the groove 10V.During formation of the groove 10V, the sidewall of the trench 10T iscovered and protected by the patterned sacrificial layer 16.Accordingly, the verticality of the sidewalls of the trench 10T can bemaintained without being damaged by the etchant of the isotropicetching. Compared to the bottom and sidewall of the trench 10T formed byanisotropic etching, the surface of the bottom of the groove 10V formedby isotropic etching is flatter, and thus the uniformity of the groove10V can be increased.

As shown in FIG. 1 and FIG. 1A, the patterned sacrificial layer 16 isremoved from the semiconductor substrate 10. After the patternedsacrificial layer 16 is removed, the semiconductor substrate 10 has afirst surface 101, a second surface 102 lower in elevation than thefirst surface 101, and a profile 103 connecting the first surface 101 tothe second surface 102. The profile 103 includes a first side surface1031, a second side surface 1032 and a third surface 1033. The firstside surface 1031 is connected to the first surface 101. The second sidesurface 1032 is connected to the second surface 102. The third surface1033 is disposed between and connected to the first side surface 1031and the second side surface 1032. The third surface 1033 is lower thanthe second surface 102. The third surface 1033 may be substantiallyparallel to the second surface 102. The first side surface 1031 and thesecond side surface 1032 may be substantially perpendicular to the thirdsurface 1033. An optical device 20 is disposed in the groove 10V to formthe optical device package 1 as illustrated in FIG. 1 and FIG. 1A.

The groove 10V may be formed by multi-stage etching to improve theverticality of the sidewall of the groove 10V (first side surface 1031),and to improve the uniformity of the bottom of the groove 10V (secondsurface 102).

Optical device packages provided by the present disclosure are notlimited to the above-described embodiments, and may include other,different embodiments, such as those described below. To simplify thedescription and for convenient comparison between each of theembodiments of the present disclosure, the same or similar components ineach of the following embodiments are marked with the same numerals andare not redundantly described.

FIG. 1B, FIG. 1C, FIG. 1D, FIG. 1E, FIG. 1F and FIG. 1G are schematicdiagrams illustrating optical device packages 2, 3, 4, 5, 6 and 7 inaccordance with some other embodiments of the present disclosure. Asshown in FIG. 1B, in comparison to the optical device package 1 of FIG.1, the second surface 102 and the profile 103 of the groove 10V of theoptical device package 2 are rough. In some embodiments, the profile 103and the second surface 102 are formed by different etching processes aspreviously described, and thus may have different roughness. In someembodiments, the surface roughness of the profile 103 is greater thanthe surface roughness of the second surface 102. For example, a ratio ofthe surface roughness of the profile 103 to the surface roughness of thesecond surface 102 may substantially range from about 10 to about 40.The surface roughness may be measured in terms of arithmetic meanroughness. For example, the arithmetic mean roughness Ra of the profile103 may substantially range from about 100 nanometers (nm) to about 200nm, and the arithmetic mean roughness Ra of the second surface 102 maysubstantially range from about 5 nm to about 10 nm.

As shown in FIG. 1C, in comparison to the optical device package 2 ofFIG. 1B, the second surface 102 of the groove 10V of the optical devicepackage 3 may be recessed and curved. The recessed and curved secondsurface 102 may fit in the contour of the optical device 20, and thusthe optical device 20 can be securely fastened in the groove 10V.

As shown in FIG. 1D, in comparison to the optical device package 2 ofFIG. 1B, the groove 10V of the optical device package 4 is deeper, andthe second surface 102 may be substantially level with the third surface1033 of the profile 103.

As shown in FIG. 1E, in comparison to the optical device package 4 ofFIG. 1D, the second surface 102 of the groove 10V of the optical devicepackage 5 may be recessed and curved. The recessed and curved secondsurface 102 may fit in the contour of the optical device 20, and thusthe optical device 20 can be securely fastened in the groove 10V.

As shown in FIG. 1F, in comparison to the optical device package 4 ofFIG. 1D, the second surface 102 of the groove 10V of the optical devicepackage 6 is lower than the third surface 1033 of the profile 103.

As shown in FIG. 1G, in comparison to the optical device package 6 ofFIG. 1F, the second surface 102 of the groove 10V of the optical devicepackage 7 may be recessed and curved. The recessed and curved secondsurface 102 may fit in the contour of the optical device 20, and thusthe optical device 20 can be securely fastened in the groove 10V.

FIG. 3 is a cross-sectional view of an optical device package 8 inaccordance with some embodiments of the present disclosure. As shown inFIG. 3, the optical device package 8 includes a semiconductor substrate50, a spacer 60 and an optical device 70. The semiconductor substrate 50may include a silicon substrate, or a substrate made from anothersemiconductive material. The semiconductor substrate 50 has a firstsurface 501 and a second surface 502 connected to the first surface 501.The second surface 502 is inclined with respect to the first surface501. In some embodiments, the second surface 502 is inclined inwardlywith respect to the first surface 501. The semiconductor substrate 50may further include a third surface 503 lower than the first surface 501and connected to the second surface 502.

In some embodiments, a protection layer 52 can be disposed on the firstsurface 501. The protection layer 52 may be configured to protect thesemiconductor substrate 10. The material of the protection layer 52 mayinclude silicon oxide, silicon nitride, or other suitable inorganicand/or organic materials.

The spacer 60 is disposed adjacent to the second surface 502. The spacer60 has a first edge 601 substantially perpendicular to the first surface501 of the semiconductor substrate 50. In some embodiments, the spacer60 has a second edge 602 in contact with the second surface 502 of thesemiconductor substrate 50. In some embodiments, the material of thespacer 60 may include a photosensitive material, which can be patternedby exposure and development. For example, the material of the spacer 60may include photoresist material or the like. In some embodiments, thefirst surface 501, the third surface 503 and the first edge 601 of thespacer 601 collectively form a groove 50V for disposing the opticaldevice 70.

The optical device 70 is surrounded by the first edge 601 of the spacer60. In some embodiments, the optical device 70 may include a tubularoptical device having a curved outer surface. For example, the opticaldevice 70 may include an optical fiber or the like. In some embodiments,the optical device 70 is in contact with the first edge 601. In someembodiments, the optical device 20 may be partially or entirelysurrounded by the first edge 601, depending on the height of the opticaldevice 70. The optical device 70 may be disposed on and supported by thethird surface 503 of the semiconductor substrate 50. The first edge 601of the spacer 60 may be substantially vertical with respect to the firstsurface 501 of the semiconductor substrate 50. With the vertical firstedge 601, the optical device 70 can be securely fastened in the groove50V, and miniaturization of the optical device package 8 can berealized.

FIG. 4A, FIG. 4B, FIG. 4C and FIG. 4D are schematic diagramsillustrating a method of fabricating an optical device package inaccordance with some embodiments of the present disclosure. As shown inFIG. 4A, a semiconductor substrate 50 is received. In some embodiments,a protection layer 52 is formed on a first surface 501 of thesemiconductor substrate 50. The protection layer 52 may be configured asa hard mask layer, partially covering the first surface 501. As shown inFIG. 4B, a patterned sacrificial layer 54 such as a photoresist layer isformed over the semiconductor substrate 50. The patterned sacrificiallayer 54 includes openings 54H exposing a portion of the first surface501. The semiconductor substrate 50 is patterned to form a groove 50V inthe semiconductor substrate 50. In some embodiments, the semiconductorsubstrate 50 is patterned through the openings 54H of the patternedsacrificial layer 54 by an isotropic etching such as wet etching. Theetching of the semiconductor substrate 50 is controlled such that thesecond surface 502 is inclined inwardly with respect to the firstsurface 501. In some embodiments, the groove 50V may have a trapezoidalcross-sectional shape.

As shown in FIG. 4C, the patterned sacrificial layer 54 is removed fromthe semiconductor substrate 50 after the groove 50V is formed. As shownin FIG. 4D, a spacer 60 is formed over the semiconductor substrate 50and in the groove 50V. In some embodiments, the spacer 60 is formed bycoating a photosensitive material such as photoresist. Thephotosensitive material may be patterned by exposure and development toform the spacer 60. The spacer 60 has a first edge 601 substantiallyperpendicular to the first surface 501 of the semiconductor substrate50, and a second edge 602 in contact with the second surface 502 of thesemiconductor substrate 50.

The optical device 70 is disposed in the groove 50V of the semiconductorsubstrate 50 to form the optical device package 8 as shown in FIG. 3. Byvirtue of the spacer 60 with the vertical first edge 601, theverticality of the sidewalls of the groove 50V can be maintained.Accordingly, the overall space of the groove 50V can be reduced, whichfacilitates miniaturization of the optical device package 8. Inaddition, the optical device 70 can be securely fastened in the groove50V.

FIG. 5 is a schematic diagram illustrating an optical device package 9in accordance with some other embodiments of the present disclosure. Incomparison to the optical device package 8 of FIG. 4, the second surface502 is inclined outwardly with respect to the first surface 501. Thefirst edge 601 of the spacer 60 is substantially perpendicular to thefirst surface 501 of the semiconductor substrate 50, while the secondedge 602 of the spacer 60 is in contact with the second surface 502 ofthe semiconductor substrate 50. In some other embodiments, the groove50V may be formed by laser drilling, mechanical drilling or othersuitable processes. In some embodiments, the groove 50V of thesemiconductor substrate 50 can be formed by etching. In someembodiments, the groove 50V may have an inverted trapezoidalcross-sectional shape.

FIG. 6 is a cross-sectional view of an optical device package 100 inaccordance with some embodiments of the present disclosure. As shown inFIG. 6, in comparison to the optical device package 9 of FIG. 5, thegroove 50V of the optical device package 100 may have a triangularcross-sectional shape.

FIG. 7A, FIG. 7B and FIG. 7C are schematic diagrams illustrating amethod of fabricating an optical device package in accordance with someembodiments of the present disclosure. As shown in FIG. 7A, asemiconductor substrate 50 such as a silicon substrate is received. Insome embodiments, a protection layer 52 is formed on a first surface 501of the semiconductor substrate 50. The protection layer 52 may beconfigured as a hard mask layer, partially covering the first surface501. As shown in FIG. 7B, the semiconductor substrate 50 is patterned toform a groove 50V in the semiconductor substrate 50. In someembodiments, the groove 50V has a triangular cross-sectional shape. Insome embodiments, the groove 50V may be formed by anisotropic etching.For example, an etching solution such as potassium hydroxide (HOH)solution or tetra-methyl ammonium hydroxide (TMAH) solution may be usedto etch the semiconductor substrate 50. KOH solution and TMAH solutionhave different etching rates on different crystalline planes of thesemiconductor substrate 50, and thus can be used to form the groove 50Vof triangular cross-sectional shape.

As shown in FI. 7C, a spacer 60 is formed over the semiconductorsubstrate 50 and in the groove 50V. The spacer 60 has a first edge 601substantially perpendicular to the first surface 501 of thesemiconductor substrate 50, and a second edge 602 in contact with thesecond surface 502 of the semiconductor substrate 50.

The optical device 70 is disposed in the groove 50V of the semiconductorsubstrate 50 to form the optical device package 100 as shown in FIG. 6.By virtue of the spacer 60 with the vertical first edge 601, theverticality of the sidewalls of the groove 50V can be maintained.Accordingly, the overall space of the groove 50V can be reduced, whichfacilitates miniaturization of the optical device package 8. Inaddition, the optical device 70 can be securely fastened in the groove50V.

FIG. 8 is a cross-sectional view of an optical device package 101 inaccordance with some embodiments of the present disclosure. As shown inFIG. 8, in comparison to the optical device package 100 of FIG. 6, theoptical device package 101 may further include a buffer layer 62disposed between the second surface 602 and the optical device 70. Thebuffer layer 62 may planarize the bottom of the groove 50V. In someembodiments, the buffer layer 62 may be disconnected from the spacer 60.In some other embodiments, the buffer layer 62 may be connected to thespacer 60. The buffer layer 62 and the spacer 60 may include the samematerial such as photoresist material, but the present disclosure is notlimited thereto. In some embodiments, the buffer layer 62 and the spacer60 may be formed by the same process such as the same exposure anddevelopment process.

With the vertical first side surface 1031, the dimension of the groove10V proximal to the first surface 101 and the dimension of the groove10V proximal to the second surface 102 are substantially the same.Accordingly, the overall space of the groove 10V can be reduced, whichfacilitates miniaturization of the optical device package 1. Inaddition, the optical device 20 can be securely fastened in the groove10V.

In some embodiments of the present disclosure, the optical devicepackage includes a groove with a vertical sidewall to dispose an opticaldevice. The vertical sidewall can reduce the overall space of thegroove, which facilitates miniaturization of the optical device package.The vertical sidewall also allows the optical device to be fastenedsecurely in the groove, enhancing alignment accuracy between the opticaldevice and other optical elements.

As used herein, the singular terms “a,” “an,” and “the” may include aplurality of referents unless the context clearly dictates otherwise.

As used herein, the terms “approximately,” “substantially,”“substantial” and “about” are used to describe and account for smallvariations. When used in conjunction with an event or circumstance, theterms can refer to instances in which the event or circumstance occursprecisely as well as instances in which the event or circumstance occursto a close approximation. For example, when used in conjunction with anumerical value, the terms can refer to a range of variation of lessthan or equal to ±10% of that numerical value, such as less than orequal to ±5%, less than or equal to ±4%, less than or equal to ±3%, lessthan or equal to ±2%, less than or equal to ±1%, less than or equal to±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. Forexample, two numerical values can be deemed to be “substantially” thesame or equal if the difference between the values is less than or equalto ±10% of an average of the values, such as less than or equal to ±5%,less than or equal to ±4%, less than or equal to ±3%, less than or equalto ±2%, less than or equal to ±1%, less than or equal to ±0.5%, lessthan or equal to ±0.1%, or less than or equal to ±0.05%. For example,“substantially” parallel can refer to a range of angular variationrelative to 0° that is less than or equal to ±10°, such as less than orequal to ±5°, less than or equal to ±4°, less than or equal to ±3°, lessthan or equal to ±2°, less than or equal to ±1°, less than or equal to±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. Forexample, “substantially” perpendicular can refer to a range of angularvariation relative to 90° that is less than or equal to ±10°, such asless than or equal to ±5°, less than or equal to ±4°, less than or equalto ±3°, less than or equal to ±2°, less than or equal to ±1°, less thanor equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to±0.05°.

Additionally, amounts, ratios, and other numerical values are sometimespresented herein in a range format. It is to be understood that suchrange format is used for convenience and brevity and should beunderstood flexibly to include numerical values explicitly specified aslimits of a range, but also to include all individual numerical valuesor sub-ranges encompassed within that range as if each numerical valueand sub-range were explicitly specified.

While the present disclosure has been described and illustrated withreference to specific embodiments thereof, these descriptions andillustrations do not limit the present disclosure. It should beunderstood by those skilled in the art that various changes may be madeand equivalents may be substituted without departing from the truespirit and scope of the present disclosure as defined by the appendedclaims. The illustrations may not be necessarily drawn to scale. Theremay be distinctions between the artistic renditions in the presentdisclosure and the actual apparatus due to manufacturing processes andtolerances. There may be other embodiments of the present disclosurewhich are not specifically illustrated. The specification and drawingsare to be regarded as illustrative rather than restrictive.Modifications may be made to adapt a particular situation, material,composition of matter, method, or process to the objective, spirit andscope of the present disclosure. All such modifications are intended tobe within the scope of the claims appended hereto. While the methodsdisclosed herein are described with reference to particular operationsperformed in a particular order, it will be understood that theseoperations may be combined, sub-divided, or re-ordered to form anequivalent method without departing from the teachings of the presentdisclosure. Accordingly, unless specifically indicated herein, the orderand grouping of the operations are not limitations of the presentdisclosure.

What is claimed is:
 1. An optical device package, comprising: asemiconductor substrate having a first surface, a second surfacedifferent in elevation from the first surface, and a profile connectingthe first surface to the second surface, wherein a surface roughness ofthe profile is greater than a surface roughness of the second surface.2. The optical device package of claim 1, wherein the profile includes ascallop shape.
 3. The optical device package of claim 1, wherein thefirst surface, the second surface and the profile collectively define arecess to receive an optical fiber.
 4. The optical device package ofclaim 3, further comprising a protection layer disposed on the firstsurface, wherein the protection layer defines an opening exposing theoptical fiber.
 5. The optical device package of claim 3, wherein thesecond surface includes a curved surface facing the optical fiber, andthe optical fiber contacts at least a portion of the curved surface. 6.The optical device package of claim 3, wherein the profile is notexposed in a view from a direction perpendicular to the first surface.7. The optical device package of claim 6, wherein the second surface isexposed in the view from the direction perpendicular to the firstsurface.
 8. An optical device package, comprising: a carrier defining arecess, wherein a sidewall of the recess includes a plurality ofconcaves with substantially uniform shapes.
 9. The optical devicepackage of claim 8, wherein in a cross-sectional view, two of theconcaves are located on two opposite sides of the recess and aresubstantially symmetrical.
 10. The optical device package of claim 8,wherein in a cross-sectional view, two of the concaves on one of twoopposite sides of the recess are substantially symmetrical along animaginary axis substantially parallel to a first surface of the carrier.11. The optical device package of claim 8, wherein centers of curvatureof the concaves are located in the recess.
 12. The optical devicepackage of claim 8, wherein in a cross-sectional view, each of theconcaves includes a crest, and the crests of the concaves aresubstantially arranged on a first imaginary straight line.
 13. Theoptical device package of claim 12, wherein in a cross-sectional view,each of the concaves includes a trough, and the troughs of the concavesare substantially arranged on a second imaginary straight line.
 14. Theoptical device package of claim 13, wherein the second imaginarystraight line is substantially parallel to the first imaginary straightline.
 15. An optical device package, comprising: a carrier defining aspace recessed from an upper surface, wherein the space includes abottom surface and a sidewall connecting the upper surface and thebottom surface; and an optical device disposed in the space; wherein thebottom surface has a curved shape fitting in a portion of a contour ofthe optical device.
 16. The optical device package of claim 15, whereinthe portion of the contour of the optical device is a bottom point ofthe optical device in a cross-sectional view.
 17. The optical devicepackage of claim 15, wherein the portion of the contour of the opticaldevice contacts the curved shape of the bottom surface in across-sectional view.
 18. The optical device package of claim 17,wherein a center of the optical device and a center of curvature of thebottom surface are located on a same side of the bottom surface in thecross-sectional view.
 19. The optical device package of claim 15,wherein at least a portion of the sidewall is substantially spaced apartfrom the optical device in a cross-sectional view.
 20. The opticaldevice package of claim 15, wherein the sidewall is substantiallyperpendicular to the upper surface in the cross-sectional view.